Quartz tuning forks with hydrogel patterned by dynamic mask lithography for humidity sensing

Seokbeom Kim · 2022-07-24T08:47:55.492Z

Ko, J., Yoon, Y., & Lee, J. (2018). Quartz tuning forks with hydrogel patterned by dynamic mask lithography for humidity sensing. Sensors and Actuators B: Chemical, 273, 821-825. LINK : https://doi.org/10.1016/j.snb.2018.06.099 #LITHOMASKLESS #HydrogelMEMS

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